Analyzers of charged particles flows with different functional capabilities
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IOP Conference Series: Materials Science and Engineering
Abstract
Parameters of instruments developed on the basis of previously calculated different
electron-optical systems for the analysis of charged particle flows were considered in the
present work. Recommendations for their application in various fields of electron spectroscopy
for the analysis of a solid surface were given.
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Saulebekov A.O. Analyzers of charged particles flows with different functional capabilities/A.O. Saulebekov, Zh.T. Kambarova//IOP Conference Series: Materials Science and Engineering. -2017. №168. Р.1-6.