Approaches to enhancing the performance of elec tron-optical systems for charged particle flow analysis

Abstract

Various methods of electron spectroscopy are currently used to analyse the surface of solids, and new instruments are constantly being developed to meet technological needs. An important element of experimental schemes is an energy analyser, which allows measuring the current density of charged particles in a given energy range. In this work, three directions for improving the corpuscular-optical characteristics of electro-optical devices are considered. The first direction is related to the modification of the deflecting field by changing the shape of the outer electrode of the cylindrical mirror (CM), which allows increasing its energy resolution. The second direction involves the use of additional electron-optical elements (lenses, mirrors), which leads to the improvement of focusing properties of analysers. The third direction concerns the development of mathematical methods of processing of output signals, which allows to reconstruct spectra of investigated sources more accurately. Improvement of electro-optical systems for the analysis of charged particle fluxes includes both calculations of new designs and modernisation of existing devices, and the development of algorithms for processing experimental data, which provides an increase in the accuracy and efficiency of spectrometric studies.