Calculation of the instrumental function of the combined energy analyzer of charged particles beam

Abstract

In this work the model of combined energy analyzer consisting of electrostatic mirror fields was studied by numerical calculations. A trajectory analysis of the motion of charged particles in the given electron-optical system was held. The instrumental function of the device for a case of a point source was first developed in order to optimize the size of output aperture and crossing windows of energy analyzer, what allowed estimating the energy resolution of the instrument. The spectrometer enables to analyze charged particles beams leaving the source at angles about 900 at the instrumental energy resolution of 2%.