Automated measuring system for investigating temperature dependence of low-frequency noise spectra in electronic elements and structures

Abstract

In this paper a measuring analytical system for low-frequency noise spectroscopy is presented. The measuring system is adapted for the automated study of low-frequency noise spectra in electronic elements, components and semiconductor materials and structures. A distinctive feature of the proposed measuring system is an automated complex local and precise study of the dependence of the low-frequency noise spectra in the sample on electrical voltage and temperature. The frequency range is 0.001-10000 Hz, DC bias range is 0-50 V and the temperature range is 7-500 К. The measuring system is adapted for use with an atomic force microscope for local measurements of electronic materials and structures noise characteristics. The measuring system makes it possible to obtain a larger amount of experimental data, which makes it possible to draw comprehensive conclusions about the mechanisms and causes of noise generation in the test sample. The results of testing the operation of the measuring system are given as an example of the Schottky diode-like structure study.