Influence of a strong electron beam on the structure of plasma coatings

Abstract

The paper reports on the application of a high-current electron beam for the modification of ion-plasma multielement coatings obtained by simultaneous sputtering of various cathodes. The methods of raster electronic and atomic force microscopy, energy dispersion analysis, microhardness measurements and tribological measurements were used. Irradiation of the coating with an electron beam leads to a dispersion of the coating structure, an increase in the microhardness, and a decrease in the coefficient of friction. The surface energy also increases, which leads to an increase in wear resistance. The melting temperature of the coating is estimated and its magnification is shown after irradiation with electrons, which leads to an increase in its heat resistance. Thus, the use of a high-current electron beam for the modification of ion-plasma multielement coatings leads to a significant increase in all its operational characteristics.